Abstract
The design of the heterostructure of a 2.5 THz range quantum-cascade detector is proposed and heterostructure is grown by molecular-beam epitaxy technique. To optimize the thicknesses of the layers of the heterostructure cascades, a numerical method for iterative solution of the Schrodinger--Poisson equation in the k· p formalism was used. The grown heterostructure of the quantum-cascade detector showed a high structural perfection, confirmed by the small values of the average FWHM of the high-order satellite peaks on the X-ray diffraction rocking curves, which were (8.3±0.5)n. Analysis of dark-field images obtained by transmission electron microscopy showed that the total thickness of the layers in the cascade is (137.3±6.9) nm, which corresponds to the calculated thickness of the layers in the cascade of the heterostructure of the quantum-cascade detector. Keywords: superlattices, quantum-cascade detector, epitaxy, gallium arsenide
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