Abstract
Epitaxial ferroelectric PbZr0.52Ti0.48O3 (PZT)/SrRuO3 (SRO) heterostructures have been grown on TiO2-terminated SrTiO3 (100) (STO) substrates by pulsed laser deposition. Atomically flat terraces of STO substrate were obtained by chemical (BHF pH–5.8, ultrasonic 10 sec) and physical (O2, 1000°C, 60 min) treatment. The 7 nm thick-SRO thin films indicate transition from three-dimension to two-dimension growth mode. The 14 nm thick-SRO film shows a structure of terraces and steps, which typically have one unit-cell height. The growth relationship of PZT(00l)/SRO(h00)/STO(h00) has been achieved. No diffraction peaks from lead deficient pyrochlore phases were observed in the XRD pattern, indicating that the film is a single crystal. The 2Pr and 2Ec values of Pt/PZT/SRO/STO structure were found to be 64 μ C/cm2 and 191 kV/cm, respectively, at the applied voltage of 5 V.
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