Abstract
Heterodyne interferometers are very sensitive tools for probing surface displacements. The wide bandwidth (about 1 GHz) and the high resolution allow many applications in the field of bulk (BAW) and surface acoustic waves (SAW). However all these interferometers exhibit low-frequency phase fluctuations depending on the optical mounting. Recent versions of these instruments reduce the noise down to the theoretical value. This paper shows the spectral density of phase fluctuations for three different configurations. The results are analysed and the noise sources are identified.
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