Abstract
Initial stage of the epitaxial growth and growing manner of the YBa2Cu3O7−x thin films on the SrTiO3(100) and MgO(100) were investigated by means of in situ reflection high energy electron diffraction (RHEED) and X-ray diffraction. In situ RHEED observation showed that the formation of the perovskite structure occurred even at initial deposit and the growth manner was layer by layer. X-ray analysis of the 100 A thick film on the SrTiO3(100) showed that the orthorhombic distortion disappeared because of the in-plane lattice deformation.
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