Abstract
Nitrogen and carbon ions were implanted into titanium and Ti-6Al-4V at substrate temperatures below 50°C. Due to the low temperature, no formation of titanium nitride or titanium carbide was observed. After a post-implantation heat treatment X-ray diffraction patterns showed interference lines of titanium nitride and titanium carbide, respectively. Differences in the diffusion coefficients of nitrogen and carbon in α- and β-titanium lead to different crystallite sizes of the hard phases. An expansion of the substrate lattice and the formation of the hard phases caused an increase in hardness and an enhanced wear resistance of titanium alloys.
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