Abstract
The distributions of the electron density in a plasma produced by helicon waves and the correspond-ing wave amplitudes and phases are studied experimentally. The measurements were carried out in an argon plasma at a pressure of 3 mtorr and at an input RF power of up to 600 W. The magnetic field was caried in the range from 0 to 200 G. The efficiency of plasma production in both uniform and nonuniform fields is investigated. It is shown that, in a nonuniform magnetic field, the electron density can be substantially increased (up to 5×1012 cm−3) by placing an antenna in the region in which the magnetic field is weaker than in the main plasma.
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