Height measurements of surface features with the scanning electron microscope

Abstract

A technique has been developed whereby the vertical dimension of a topological feature may be measured in situ in the scanning electron microscope. The technique, which consists of relating objective lens current to focal point location, is reproducible over the range 0–5 mm to an accuracy of ±0.08 mm. The utility of the technique is demonstrated by measuring fiber pull-out lengths from a boron-aluminum composite fracture surface. Results are compared to those obtained by light optical microscopy.