Height measurement of transparent objects by adopting differential interference contrast technology

Abstract

In this study, the differential interference contrast (DIC) approach originally used for image enhancement to increase the contrast between a transparent object and the background is adopted for the dimension measurement of transparent structures. With the phase difference image retrieved using the DIC technique, the phase map of the examined object can be approximated by integrating the phase difference. The need of integration accuracy is much higher for measurement than for image enhancement. In this study, a modified Fourier phase integration is proposed to reduce the effects of noise on surface profile reconstruction. The simulation results show that the proposed approach can effectively reduce the effects of noise. Experimental results are also conducted to study the feasibility of using the transmitted DIC with the proposed integration method for transparent object measurement. The results show that the height of a transparent structure measured using the DIC method is quite close to those measured using an atomic force microscope, while those measured using the white-light interference method result in a much larger measurement than all others.