Abstract
Multilayer reflecting thin films of the systems TiO2-SiO2 and ZrO2-SiO2 were deposited on glass surface using the sol-gel technique. A 12C beam was utilized in RBS analysis to investigate the inner structure of these multilayer stacks. No evidence for defects or diffusion between the layers were found. Optical Spectroscopy showed wavelength selectivity in the reflection of an 8-layer TiO2-SiO2 sample.
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