Abstract
Heavy ion microprobes such as a few MeV Si, Ni beams with a beam size of a few microns were applied for micro-analysis of iron using PIXE. Stainless steel foil or iron substrates were analyzed by 5 MeV Ni 3+, Si 3+ and 2 MeV proton beams. The X-ray spectra showed that the X-ray emission strongly depended on the incident ion species. It shows that the Si probe has a higher sensitivity to the Fe-L X-rays than that of the proton beam. On the contrary, the proton has higher sensitivity to the Fe-K X-rays than the Si beam. The Ni probe has more higher sensitivity for both energies of X-rays than the other probes. It is considered that molecular orbital effects took place between Fe and Ni atoms due to very close level matching. The energy shift and broadening due to multi-ionization were observed in the Fe-L X-ray spectra of the Si and Ni impacts.
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