Abstract
The article reports on the Xe ion beam irradiation studies of Ni 3N/Al bilayers at 80 K. The ion-induced modifications were monitored by Rutherford backscattering (RBS), resonant nuclear reaction analysis (RNRA), X-ray diffraction (XRD) and atomic force microscopy (AFM). We found preferential loss of nitrogen from the surface region of the Ni 3N top layers. The surface roughness Δσ S and the interface broadening variance Δσ int 2 increase linearly with the Xe ion fluence Φ. The experimental mixing rate of Δσ 2/Φ=1.8 nm 4 is explained by considering an enhancement of ballistic mixing due to chemical reactions at the interface.
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