Abstract
The heat transfer characteristics of rarefied flows in a micro-actuator are studied numerically The effect of Knudseti number (Kn) on the heat transfer of the micro-actuator flows is also examined The (Kn) based on gas density and characteristic dimension is varied from nearcontinuum to highly rarefied conditions Direct simulation Monte Carlo calculations have been performed to estimate the performance of the micro-actuator. The results show that the magnitude of the temperature jump at the wall increases withKn Also, the heat transfer to the isothermal wall is found to increase significantly withKn
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