Heat transfer in β-Ga2O3 crystal grown through a skull melting method

Abstract

Heat and mass transfer in β-gallium oxide crystals grown via a skull melting method were numerically studied. Specifically, we calculated the temperature and velocity distributions in a furnace for the skull melting method. The distributions covered the entire system: the growing crystal, melt, raw material, basket, and coils generating heat through the radio frequency electromagnetic field. We determined the dependences of temperature and melt flow velocity distributions on the coil position.The results indicate that the melt flow direction is opposite to that in the Czochralski method and that a descending flow exists near the periphery of the melt. The results also show that the maximum temperature of the melt, which affects the overheating conditions of the melt, depends on the position of the coil.