Abstract

Measuring heat flow is an effective method for thermal analysis. A new type of heat flow sensor was developed by using printed circuit board (PCB) manufacturing processes. The sensor features high sensitivity and thinness. Although a thermopile is used for the thermoelectric element in the conventional heat flow sensor, this newly adopted one uses a semiconductor as the thermoelectric element. The thermoelectric elements are densely packed into the sensor. The sensor can detect the heat flow that is generated by a temperature difference of around 0.001 degree Celsius. Furthermore, the features of the sensor make it possible to install the sensors in the factory equipment. Also, because of tiny amounts of absorption or generation of heat in equipment, machine status monitoring with heat flow sensors is possible.

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