Abstract
The pyroelectric responses of multilayer, thin film pyroelectric detector under both isolated and heat sink boundary conditions are completely analyzed. The multilayer detector is composed of pyroelectric layer/thermal isolation layer/silicon substrate. The analytical result shows that when the thickness of the isolation layer is increased, the detectivity, D* at tow frequencies will be improved, and as the thickness of pyroelectric layer is decreased, the high frequency response becomes better. D* of a detector with 1 /spl mu/m PLZT/10 /spl mu/m porous silica/0.5 mm silicon is higher than that of the detector with 10 /spl mu/m PLZT/1 /spl mu/m porous silica/0.5 mm silicon in a wide frequency range. In order to get a better performance of a multilayer thin film detector, the thicknesses of the two layers should be chosen very carefully. This analysis provides a guide for the preparation of the multilayer thin film pyroelectric detectors.
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