Abstract
A single optical wedge micro-scanning system was designed and added to a Hartmann sensor by analyzing Hartmann–Shack sensor wave-front theory and micro-scanning technology. Micro-scanning overcame the lack of detection accuracy caused by small numbers of pixels in the detector, which gave the Hartmann–Shack sensor high-precision detection with a low number of pixels. Combined with a wave-front reconstructed algorithm and micro-scanning reconstructed high-resolution algorithm, the results were achieved using Lighttools and Zemax software. The wave-front reconstruction accuracy of three CCD detectors which are added to micro-scanning device can raise 72.55%, 32.47%, 0.48%.
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