Abstract
In this paper, we study the snapping action of a micromachined bistable mechanism harmonically driven with an ultra-small actuation stroke, which is realized through the mode amplification in a two-degrees-of-freedom (2-DOF) vibration system using an on-chip electrostatic actuator. The micromachined bistable mechanism is based on a curved beam configuration. The dynamic response of the device is theoretically predicted with the harmonic balance method. Further, to demonstrate this proposed study, a microelectromechanical systems (MEMS) prototype device is designed, fabricated, and tested. In experiments, the forward and backward state switching actions of the prototype device are realized with actuation stroke smaller than $0.4~\mu \text{m}$ , while the traveling distance between the two states is about $18~\mu \text{m}$ . To the best of our knowledge, we demonstrate for the first time the state switching of a cured beam bistable mechanism using harmonic driving in a 2-DOF vibration system. This paper has potential in applications including MEMS switches and MEMS filters. [2017-0221]
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