Abstract

The Lorentz dispersion theory and the Kramers–Kronig transformation were widely used to determine optical constants and oscillator parameters from reflectivity spectrum. Each range of data correspond to a different oscillation. Since the experimental data is in the limited range, this technique can be used to subtract information from unmeasured range. The inter-band optical properties in UV region have been investigated. Hydrogenated amorphous silicon nitride thin film was used as an example. The reflectivity spectrum of a-SiN x :H was used to obtain the energy band gap in both standard and this technique. The measurement is in the UV-visible range. The optical energy gap value was found to be about 5.2 eV for the sample illustrated, and these values are consistent for both techniques.

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