Abstract
With the rapid development of production scale and technology level in the field of precision engineering technology, plane motor is a new type of motor which can directly output plane motion and has the characteristics of simple structure, high precision and fast response speed. In this paper, the magnetic levitation plane motor (MLPM) as the research object, it is a hot research and development in recent years, MLPM has a good application prospect in driving advanced manufacturing equipment used under high vacuum conditions. In this paper, the harmonic characteristics of magnetic levitation plane motor are analyzed by establishing the analytical model of each odd harmonic. The actual magnetic field of the permanent magnet array is measured on the measuring platform of Tesla meter, and the measurement results are analyzed. And then the analytical data are compared with the actual field data. Further calculation shows that the maximum relative error between the simulated and measured results decreases gradually with the increase of the odd harmonic order of the magnetic field.
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