Abstract
The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bearing steel, Al2024 aluminum alloy and (111) Si wafer. Although no clear influence of the substrate type on hardness and indentation modulus of the coatings at different acetylene and hydrogen additions was observed, when both measured properties were combined in HITEIT ratio, significant shift of HIT/EIT ratio dependencies obtained on Al alloy vs. steel and Si wafer substrates occurred. Thus, the effect of substrate type on the measurementlevaluation was confirmed.
Highlights
Tribological properties of hard coatings, especially their wear resistance, coefficient of friction (COF) depend on large number of parameters including loading and environmental conditions and material system used for the coating, its structure, surface roughness and such properties as hardness, elastic modulus, and others
Called “10 % rule” is often applied to determine such maximum depth and true hardness of the coating, respectively [5,6,7,8,9,10]. Another approach to eliminate substrate influence and to determine true coatings properties is to use hardness – indentation depth profiles obtained from continuous multi-cycle (CMC) or continuous stiffness measurements (CSM) [11]
The measurements were performed on HiPIMS (High Power Impulse Magnetron Sputtering) W-C and W-C:H coatings deposited using hybrid PVD-PECD (Physical Vapor Deposition – Plasma Enhanced Chemical Vapor Deposition) process with different acetylene and hydrogen additions on three different substrates
Summary
Tribological properties of hard coatings, especially their wear resistance, coefficient of friction (COF) depend on large number of parameters including loading and environmental conditions and material system used for the coating, its structure, surface roughness and such properties as hardness, elastic modulus, and others. It was found out that the H/E and/or H3/E2 ratios are related to the level of plasticity and can be used to estimate changes in the toughness of the coatings [2,3,4] This is of significant interest because toughness is among the main parameters, besides hardness, Young’s modulus, COF, wear, scratch, oxidation and corrosion resistance of the coatings for engineering applications. The measurement of mechanical properties, involving hardness, elastic modulus and toughness in the coatings with the thickness in the range of few micrometers is a challenge even by nanoindentation because of the inevitable influence of the substrate on the measurement of the coating properties. The measurements were performed on HiPIMS (High Power Impulse Magnetron Sputtering) W-C and W-C:H coatings deposited using hybrid PVD-PECD (Physical Vapor Deposition – Plasma Enhanced Chemical Vapor Deposition) process with different acetylene and hydrogen additions on three different substrates
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