Abstract
Au/NiCr/Ta soft metallic multilayered films were deposited on hard Al 2O 3 substrate by magnetron sputtering. The distribution of hardness and elastic modulus was investigated by nanoindentation continuous stiffness measurement technique. The film hardness was constant for all samples at indentation depths 1/7 ≤ h/ t ≤ 1/4, which can be considered as the true hardness. The hardness increased with increasing indentation depths at 1/4 ≤ h/ t ≤ 1. The hardness was shown to be not regular at indentation depths h/ t ≤ 1/7; this is due to the different surface roughness of films. Compared to the hardness, the measured elastic modulus was more sensitive to the substrate.
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