Abstract
AbstractDual ion implantation of titanium and carbon was shown to produce an amorphous surface layer in annealed bulk nickel, in electroformed Ni, and in electroformed Ni7 5Fe 2 5. Diamond-tip nanoindentation coupled with finite-element modeling quantified the elastic and plastic mechanical properties of the implanted region. The amorphized matrix, with a thickness of about 100 nm, has a yield stress of approximately 6 GP and an intrinsic hardness near 16 GPa, exceeding by an order of magnitude the corresponding values for annealed bulk Ni. Implications for micro-electromechanical systems are discussed.
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