Abstract
A quad-mirror system is developed for nanofocusing of hard x-ray beam. The optical system consists of four spherical-concave total-reflection mirrors. Each two mirrors are combined in a tandem-mirror configuration to compensate spherical aberrations in grazing-incidence mirror optics, and a pair of the tandem-spherical mirrors is configured in a crossed mirror system (Kirkpatrick-Baez optics) to eliminate astigmatism in grazing incidence optics. Focusing properties are tested at the beam line 20XU of SPring-8. The focused beam size measured by knife-edge scan method is 170 nm x 190 nm at 10 keV. Preliminary experiments on scanning x-ray microscopy are also carried out, and a fine structure of 100 nm-line/100 nm-space is resolved in the measured image.
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