Hard X-ray Microbeam Experiment at the Tristan Main Ring Test Beamline of the KEK

Abstract

A hard X-ray microbeam with zone-plate optics has been tested at the MR-BW-TL beamline on the Tristan main ring of the KEK, and preliminary experiments on scanning microscopy have also been performed. A sputtered-sliced Fresnel zone plate with an Au core and Ag/C multilayer is used as an X-ray focusing device. The outermost zone width of the zone plate is 0.25 microm. A focused spot size of approximately 0.5 mum has been achieved at an X-ray energy of 8.54 keV. In a scanning X-ray microscopy experiment, test patterns with submicrometer fine structure have been clearly resolved.