Hard molybdenum coatings prepared by cathodic magnetron sputtering

Abstract

Carbon- or nitrogen-alloyed molybdenum coatings were obtained in the reactive mode by cathodic magnetron sputtering of a molybdenum target with argon, methane and nitrogen gases. These deposits showed Vickers' hardnesses up to 30 000 MPa for the Mo-C coatings and 35 000 MPa for the Mo-N coatings. The wear resistance of these deposits, which showed a dense morphology, was superior to that of electrolytic hard chrome. The fatigue properties of test pieces coated with Mo-C were better than those with hard electrolytic chrome and, in some cases, even better than the uncoated pieces. For all these properties, Mo-C and Mo-N coatings were very attractive for mechanical applications in corrosive, cyclically stressed and abrasive wear environments.