Abstract
Silicon tetrafluoride undergoes halogen exchange reactions with both phosphorus trichloride and phosphoryl chloride at temperatures of 500–600°C yielding mixed chlorofluorides of silicon and phosphorus. It is interesting to note that, at these high temperatures, PCl 3 undergoes complete exchange to form PF 3 while POCl 3 reacts only with partial substitution, the major products being phosphorus chloride difluoride and silicon trichloride fluoride.
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