Abstract
Magnetic-field dependent resistivity and Hall-effect measurements combined with high resolution mobility spectrum analysis (HR-MSA) were employed to study room-temperature electronic transport in 4H-SiC metal–oxide–semiconductor field-effect transistor (MOSFET) structures. It is shown that the mobility distribution for electrons at the SiO2/SiC interface is significantly broader than expected for quantum confined carriers, exhibiting Hall scattering factors significantly greater than the generally assumed unity value. The interfacial electron mobility and Hall scattering factor are likely to be determined by potential fluctuations arising from a disordered transition layer on the SiC side of the SiO2/SiC interface. For the MOSFET structures studied, charge trapping at the SiO2/SiC interface was found to determine the interfacial free electron sheet density, in agreement with prior studies on similar device structures. HR-MSA has enabled unambiguous discrimination between electrons in the ion-implanted buried channel layer and at SiO2/SiC interface in a depletion-mode MOSFET structure.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
