Abstract
In the present paper, we study the interaction between atomic hydrogen generated in a microwave afterglow with amorphous hydrogenated carbon films. A simple surface model is described and compared with the experimental results. Erosion rate is time dependent and exhibits a transient regime before reaching a constant value. Estimate of the modified film thickness by ellipsometry shows that thickness increases with time and becomes constant and equal to 1.4 nm when reaching the permanent regime. In addition, this limit is independent on the conditions, e.g., on hydrogen flux and temperature. Erosion rate depends linearly on hydrogen flux arriving at the surface and shows an exponential increase with surface temperature. A simple model proposed in the paper is in good agreement with the experimental data and allows giving an estimate of the erosion activation energy Ea=0.2 eV. This value is in agreement with the energy involved in the reaction between hydrogen atom and carbon atom in sp3 hybridization.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
