Guiding effects of electric and magnetic fields on the plasma output of a cathodic arc magnetic filter

Abstract

A magnetic filter was inserted between the cathodic arc plasma source and chamber to reduce the amount of macroparticles transmitted from the plasma to the sample. The plasma output of the magnetic filter was determined as a function of magnetic field and bias voltage, for the cases when the bias was applied to the entire duct wall or to a Bilek bias plate alone. The factors affecting plasma diffusion in the duct were investigated. As well as collisional and inhomogeneous magnetic field effects, our computer simulation and experimental results indicate that the E×B drift results in an additional diffusion flux for the case when a Bilek bias plate is used. Hence the Bilek biasing mode results in a lower plasma output than for the case in which the entire duct is biased.