Abstract
Although guiding slow multi-charge ion beams using insulator capillaries has been vigorously studied for the last two decades, controlling the shape and surface condition of the inner wall of the capillary has been an issue. We attempted to guide 7.5 keV Ar3+ ion beams using a channel formed by a pair of cylindrical convex glass and a cylindrical concave glass to resolve this issue. We measured both the charge state and the kinetic energy of the exiting ions from the cylindrical glass channel. The ions kept both their initial charge state and initial kinetic energy during transportation in the channel, even at tilt angles from ‒3° to +3°. Guiding using a pair of curved glass surfaces has the advantage of more easily controlling the shape and surface condition of the capillary. This technique can make it easy to precisely adjust the incident angle of the ion beam onto various targets.
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