Abstract
Recent industrial demands in the fields of microsystems and device miniaturization led to development of two major technologies, micro-electro-mechanical (MEM) and micro-optics. A promising team-up of these two technologies combined with microelectronics creates a rich enabling technology of micro-opto-electro-mechanical (MOEM) systems. All constituent technologies in MOEM allow for batch processing and embossing and include a micromachining process that makes them highly fascinating for commercial applications.
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