Abstract
The authors have proposed 1 m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> -ordered plasma equipment using slotted waveguide arrays. Microwave at 2.45 GHz is used for the excitation. Design for uniform aperture electromagnetic (EM) field distribution on the vacuum window is succeeded by the generalized scattering matrix (GSM)- method of moments (MoM) analysis by neglecting plasma. Even if the uniform EM distribution is obtained, the realization of uniform plasma density distribution is difficult. And the GSM-MoM/FDTD hybridization analysis is proposed in order to consider the effect of plasma. The accuracy of the GSM-MoM/FDTD analysis is confirmed. In order to consider non-linearity of plasma, the measured electron density and temperature of plasma is used in the GSM-MoM/FDTD analysis.
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