Abstract

The formation of different types of twins were observed in SiGe/graded buffer/Si(110) heterostructures grown at different substrate temperatures using gas-source molecular beam epitaxy. It was found that the growth twins were dominant when the substrate temperature was lower than 700 °C. The growth at higher substrate temperature effectively suppressed the nucleation of growth twins and resulted in the formation of another type of defect, microtwin lamellas, which accompany the strain-relaxation process.

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