Abstract
Y2O2S:Eu phosphor films were prepared by reactive magnetron sputtering with a Y2O3:Eu target in a H2S and argon mixed atmosphere, and hot carrier injection (HCI)-type EL devices with Y2O2S:Eu/ZnS/Y2O2S:Eu structure were fabricated. It is found that the crystal structure of Y2O2S:Eu films depends on the sulfur concentration in the film. With increasing atomic ratios of S/Y, the crystal phase is changed from cubic to hexagonal. Luminescent spectra from the films are dependent on the crystal structures.
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