Abstract
The growth and electrical-optical properties of dc-magnetron-sputtered ultrathin silver (Ag) films on glass and TaN x /glass were investigated by using scanning electron microscopy, transmission electron microscopy, auger electron spectroscopy (AES), UV-Vis-NIR spectrometry and the four-point probe method. The agglomeration and inter-diffusion of Ag was effectively reduced by the TaN x layer, and Ag films on TaN x (10 nm)/glass formed a smooth and dense surface. TaN x film deposited on the Ag/TaN x /glass also shows a uniform microstructure. The Ag film in the TaN x interlayer has at least three times lower resistance than that of Ag/glass, which can be attributed to the growth mode of the Ag films. The optical properties of the Ag films were greatly improved by the TaN x layer. In the near infrared region, Ag/TaN x /glass and TaN x /Ag/TaN x /glass films showed a drastic decrease in transmittance compared to Ag/glass.
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