Abstract
A study of the formation of films of Cd x Hg 1− x Te solid solutions by sputtering in a mercury vapour plasma was carried out. The condensation rate and the condensed material composition were investigated experimentally as functions of the main sputtering parameters, namely the sputtering pressure, the substrate temperature, the sputtered fluxes, the target voltage and the bias voltage. The role of the mercury vapour pressure was determined, as well as the conditions of formation of single-phase or two-phase films. The study of condensed fluxes and condensation coefficients of cadmium and tellerium atoms contributed to the understanding of the growth process.
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