Abstract
The effect of the surface structure of Bi2Se3 on its interior properties has been well studied recently, but the interfacial structure and electrical properties of the oxidized Bi2Se3 surface are little known. In contrast to the self-limited formation of native oxide on Bi2Se3, the degree of oxidation on the Bi2Se3 surface in oxygen plasma is enhanced. Results of transmission electron microscopy and X-ray photoelectron spectroscopy show that the surface of the oxidized Bi2Se3 is composed of a layer of amorphous bismuth oxide (BiOx), and the thickness of the BiOx layer can be controlled by the length of the plasma process. Electrical measurements of this structure present the Schottky-type transport property at the interface between the oxidized layer and the bulk Bi2Se3 crystal, and the turn-on voltage depends on the thickness of the surface BiOx layer. This study of the structure, formation mechanism, and electrical properties of the surface oxide of Bi2Se3 formed in oxygen plasma provides useful informa...
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