Abstract
ABSTRACTBulk aluminum nitride boules have been grown at driving rates of 0.9mm/h by the self-seeded sublimation-recondensation technique. Up to 15mm diameter substrates cut from those boules present large single crystal grains that have been analyzed using different techniques. X-ray double crystal diffraction shows a full-width-at-half-maximum of around 100 arcsec and X-ray topography reveals extensive areas with a density of dislocations less than 104 cm−2. These substrates have been prepared by chemical mechanical polishing techniques to obtain a surface roughness of 1.4-1.6nm.
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