Abstract

Oxygen plasma assisted molecular beam epitaxial (MBE) growth of Pr 1− x Sr x MnO 3 thin films has been carried out on NdGaO 3(1 1 0) substrates. The growth parameters have been optimized to realize nearly 2D layer-by-layer growth. XRD results of the epi-films show that the Pr 1− x Sr x MnO 3/NGO (1 1 0) thin films are of high crystal quality, as clear (‘clean’) diffraction peaks can be observed belonging to the film and the substrate, respectively. Based on analysis of the peaks, it was concluded that epitaxial relation is PrSrMnO 3 (1 1 0)∥NdGaO 3 (1 1 0), i.e., the c-axis being parallel to the surface. It is a different epitaxial relation from that of other growth methods.

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