Abstract
Nonpolar m-plane (11̄00) ZnO epitaxial films were grown on (100) β-LiGaO2 (LGO) substrates by plasma assisted molecular beam epitaxy (PAMBE). The dependence of growth characteristics on the growth temperatures was investigated. The surface morphologies of ZnO films were characterized by scanning electron microscopy and atomic force microscopy. Furthermore, the structural properties characterized by high resolution X-ray diffraction (HRXRD) indicated that the ZnO epilayers were grown in the nonpolar [11̄00] orientation. Detailed structural characterization and defect analysis of nonpolar ZnO epilayer on β-LiGaO2 substrate were studied by transmission electron microscope (TEM). Optical properties of m-plane ZnO films were investigated by Raman spectroscopy and photoluminescence analyses.
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