Growth of nickel single crystals with a diameter of 8 in. using the Czochralski method

Abstract

We grew large single crystals of metal nickel with a maximum diameter of 8 in. using the Czochralski (CZ) method. Characteristics of the metal material, namely, the seed elongation and intense cooling radiation at high temperatures during crystal growth, are the main challenges when growing ingots with large diameters. These problems were resolved by optimizing the parameters related to crystal growth, such as reduction of crucible and ingot rotation speed, and adjustment of shoulder formation angle of ingot shape. The produced ingots were confirmed to be single crystals by the Laue back-reflection method. Wafers were cut from single crystal ingots using a multi-wire saw with diamond abrasive grains. A smooth, mirror-like surface was obtained on the wafers by using an ordinary mechanical polishing method. The full width at half maximum values of the X-ray rocking curve of the metal nickel crystal surface significantly depends on the surface treatment method. It was found that ordinary mechanical mirror polishing introduces strain on the surface and non-uniformity of the crystal orientation.