Abstract
LixLaySrzMnO3 thin films of various compositions (x,y,z) have been grown using pulsed laser deposition. The compositions of the films have been studied as a function of deposition temperature, target-to-substrate distance and deposition pressure with respect to different cation ratios of the targets by inductively coupled plasma mass spectrometry. When growing multi-elemental oxide thin films containing lithium (with its large mass difference to other elements), lithium loss is most probably inevitable. But the desired thin film composition can be achieved by selecting specific growth conditions and different target compositions. The experiments also elucidate some of the mechanisms behind the incongruent lithium transfer from the targets to thin films.
Highlights
One can conclude that the fabrication of materials containing a mixture of light and heavy elements with Pulsed laser deposition (PLD) leads to deviations in the films composition at certain pressures
These experiments were helpful to elucidate some of the dynamics leading to lithium loss during the PLD process when growing multielement oxide thin films with a mix of very light and heavy cations
The target-IDs (T for target) correspond to the remaining lithium content determined by inductively coupled plasma mass spectrometry (ICP-MS) in the target after sintering
Summary
The general interest to fabricate lithium containing thin films has been growing since they can be used and integrated in micro-batteries utilised as power sources for nano-devices like smart cards, implantable medical devices and microsensors. [1, 2] For these applications, it is necessary to grow high-quality thin films (with respect to crystallinity, composition, etc.) containing light and reactive elements like Li and heavier elements such as Co, Mn, Ni. [3] The increased activity in developing all solid-state lithium batteries has sparked extensive research to produce and characterise lithium containing films including oxides. [4, 5]. For LiMn2O4, Dumont et al [16] showed that there are deviations in composition for high background pressures and have a strong influence on chemical and physical properties From these observations, one can conclude that the fabrication of materials containing a mixture of light and heavy elements with PLD leads to deviations in the films composition at certain pressures. [19] As the method exhibits a high degree of freedom when it comes to growth conditions it is challenging to find the best conditions for the desired thin film In this specific case, these experiments were helpful to elucidate some of the dynamics leading to lithium loss during the PLD process when growing multielement oxide thin films with a mix of very light and heavy cations
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