Abstract
LiCaAlF6 (LiCAF) single crystals with an extended diameter were grown by the Czochralski (CZ) technique under CF4 atmosphere. Modifying the growth conditions enabled the growth of LiCAF single crystals with 3- and 4-inch diameters. After considering reflection loss, LiCAF showed transmittance over 95% at 157 nm. A precise measurement of the refractive index showed that the birefringence of LiCAF vanished at around 152 nm. The fabrication of a LiCAF lens was demonstrated.
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