Growth of large sp2 domain size single and multi-layer graphene films at low substrate temperature using hot filament chemical vapor deposition

Abstract

Single, bi and a few layer graphene films of large sp2 domain size were grown on Ni foil using hot filament chemical vapor deposition at a relatively low substrate temperature of 700°C. The number of layers was found to vary from 1 to 6 and 7 to 12 for the films deposited at a process pressure of 1.5mbar for the deposition time of 30 and 20min, respectively. Further at a lower process pressure of 1mbar, 2–8 layers were obtained for 10min deposition time. The measured average sp2 domains size was found to be in the range of 117–279nm in the case of 1–6 layers of graphene films. These large domain size graphene films could be very useful for graphene based electronic devices and other applications.