Growth of InAlGaN Quaternary Alloys by Pulsed Metalorganic Chemical Vapor Deposition**Supported by the National Science and Technology Major Project of China under Grant No 2013ZX02308-002, and the National Natural Science Foundation of China under Grant Nos 11435010, 61474086 and 61334002.

Abstract

Epitaxial growth of InAlGaN/GaN structures are performed on the c-plane sapphire by pulsed metal organic chemical vapor deposition with different triethylgallium (TEGa) flows in the growth process of InAlGaN quaternary alloys. X-ray photoelectron spectroscopy results show that the Al/In ratio of the samples increases as the TEGa flows increase in the InAlGaN quaternary growth process. High-resolution x-ray diffraction results show that the crystal quality is improved with increasing TEGa flows. Morphology of the InAlGaN/GaN heterostructures is characterized by an atomic force microscopy, and the growth mode of the InAlGaN quaternary shows a 2D island growth mode. The minimum surface roughness is 0.20 nm with the TEGa flows equaling to 3.6 μmol/min in rms. Hall effect measurement results show that the highest electron mobility μ is 1005.49 cm2 /Vs and the maximal two-dimensional electron gas is 1.63 × 1013 cm−2.