Abstract
The growth of well-ordered Mn nanodots arrays onSi(111)-7 × 7 reconstructed surfaces was investigated by means of scanning tunnelling microscopy (STM)as well as kinetic Monte Carlo (KMC) simulation. Mn atoms deposited slowly onto elevatedsubstrates were observed to occupy preferentially on the faulted half unit cells (FHUCs) of theSi(111)-7 × 7 surface. The preference occupancy in the FHUCs,PF, defined as the ratio of the number of FHUCs occupied by Mn nanodots to the number of alloccupied in the two halves, decreases with increasing deposition rate as well as decreasingsubstrate temperature. The KMC simulations, which are in good agreement with theexperimental results, were employed to optimize the growth conditions, including depositionrate and substrate temperature, for the self-organized growth of Mn nanodots arrays onSi(111)-7 × 7 reconstructed surfaces. By adjusting the deposition rate, one can control the growth ofwell-ordered and uniform Mn nanodots arrays to form either a triangular symmetry or ahoneycomb one.
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