Abstract
ErBa 2Cu 3O 7− δ thin films are grown by pulsed laser deposition (PLD). Using a SrTiO 3 as a lattice matched substrate. In the film growth, the substrate temperature is varied from 720 to 780 °C. From X-ray diffraction (XRD) patterns, only the 0 0 l reflections from the ErBa 2Cu 3O 7− δ films are observed. The average of the c-axis length of the other films is 11.6875 Å. ErBa 2Cu 3O 7− δ film grown at 735 °C is excellent in the crystallinity, while the intensity of 0 0 l peaks of the film grown at more than 780 °C obviously weakened. The zero resistance T c is 90.5 K. Superconducting transition width is 1.5 K. Large and flat grains are observed by atomic force microscopy (AFM) at the surface of the film. From the scanning electron microscope (SEM) image, we confirmed some grains with the size of approximately 200 nm in diameter on the ErBa 2Cu 3O 7− δ thin film. We observe the interface of ErBa 2Cu 3O 7− δ and substrate clearly by transmission electron microscopy (TEM) measurements.
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