Abstract
Self-organized α-FeSi2 nanocrystals on (100) silicon substrate were synthesized by molecular beam epitaxy with Au catalyst. The microstructure and basic orientation relationship between the silicide nanocrystals and silicon substrate were analyzed in detail. α-FeSi2 nanocrystals appeared to be inclined trapezoid and rectangular nanoplates, polyhedral nanobars and pyramid-like ones, aligned along <011> directions on (100) silicon substrate with the length up to 1.5µm, width ranging between 80 and 500nm and thickness from 30 to 170nm. As has been proposed metallic iron silicide may be used for manufacturing electric contacts on silicon. A current–voltage characteristic of the structure was measured at room temperature and showed good linearity.
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