Abstract
Diamond-like carbon (DLC) possesses an array of valuable properties: outstanding abrasion and wear resistance; chemical inertness; exceptional hardness; low coefficient of friction; and high dielectric strength. Methods used to deposit DLC include ion beam deposition, cathodic arc spray, pulsed laser ablation, argon ion sputtering, and plasma-enhanced chemical vapor deposition. In the present work, carbon nano-structures were doped by boron atoms to synthesize icosahedral boron carbide using Hot Filament Chemical Vapor Deposition(HFCVD) system. Raman spectroscopy, X-ray diffraction technique, Debye-Scherrer calculation, Tuinstra-Koenig formula and scanning electron microscopy results were presented and discussed.
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