Abstract
ABSTRACTCuO and CuGaO2 thin films have been grown on Si (100) substrates using a sol-gel spincoating method. CuO films were successfully fabricated by the annealing around 700°C. At higher temperatures (>800°C), pyramidal CuO islands with 1~2μm in width and 0.4~0.8μm in height were observed. They arranged structures as a straight line parallel to the <110> and <010> directions, which suggests the self-organized growth of CuO pyramidal islands. Delafossite CuGaO2 films were fabricated as well, using Cu-Ga-O mixed solutions with Ga/(Cu+Ga) atomic ratio of 0.5. These results indicate that Cu-based compounds were fabricated by the sol-gel spincoating method.
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